PECULIARITY OF REACTIVE MAGNETRON DEPOSITION OF TANTALUM OXIDE FILMS WITH DIFFERENT METHODS OF GAS SUPPLY INTO THE CHAMBER
| Autor: | H.T. Doan, D.A. Golosov, V.A. Burdovitsin, S.M. Zavadski, S.N. Melnikov |
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| Rok vydání: | 2022 |
| Zdroj: | Problems of Physics, Mathematics and Technics. :97-104 |
| ISSN: | 2077-8708 |
| DOI: | 10.54341/20778708_2022_3_52_97 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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