Development of a large-area transformer coupled plasma source
| Autor: | Yong-Sup Hwang, Kyeong Hwan Han, Hae-Yeol Kim, N.S Yoon |
|---|---|
| Rok vydání: | 1999 |
| Předmět: |
Imagination
Chemical substance business.industry Chemistry media_common.quotation_subject Metals and Alloys Impedance matching Analytical chemistry Surfaces and Interfaces Plasma Dielectric Low frequency Inductive coupling Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Physics::Plasma Physics law Materials Chemistry Optoelectronics business Transformer media_common |
| Zdroj: | Thin Solid Films. 341:22-26 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/s0040-6090(98)01515-6 |
| Popis: | A large-area transformer coupled plasma (TCP) source has been designed and constructed. In our design, a plasma generation chamber and a radio-frequency (RF) antenna chamber have been separated with a dielectric material, and differentially pumped to accommodate large-area, relatively thin dielectric windows against mechanical pressures. With a large diameter (78 cm) chamber, a low frequency (4 MHz) RF source has been chosen. By calculating the plasma impedance from TCPRP codes based on a 2D heating theory [1], the diameter of a single-turn copper coil antenna was optimized to provide high-density plasmas in the large area. Also the impedance matching circuit of this large-area TCP source has been designed from the calculated plasma impedance. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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