Effects of N2O gas addition on the properties of ZnO films grown by catalytic reaction-assisted chemical vapor deposition
| Autor: | Makoto Morioka, Shingo Kanauchi, Yasuhiro Tamayama, Kanji Yasui, Takahiro Kato, Yuki Ohashi |
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| Rok vydání: | 2015 |
| Předmět: |
Photoluminescence
Materials science Dimethylzinc Inorganic chemistry Nanoparticle chemistry.chemical_element Surfaces and Interfaces Chemical vapor deposition Zinc Condensed Matter Physics Surfaces Coatings and Films Catalysis chemistry.chemical_compound Full width at half maximum chemistry Chemical engineering Platinum |
| Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 33:061519 |
| ISSN: | 1520-8559 0734-2101 |
| Popis: | The influence of N2O gas addition on the properties of zinc oxide (ZnO) films grown on a-plane (11–20) sapphire (a-Al2O3) substrates was investigated, using a chemical vapor deposition method based on the reaction between dimethylzinc and high-temperature H2O produced by a catalytic H2-O2 reaction on platinum (Pt) nanoparticles. The addition of N2O was found to increase the size of the crystalline facets and to improve the crystal orientation along the c-axis. The electron mobility at 290 K was also increased to 234 cm2/Vs following the addition of N2O gas at a pressure of 3.2 × 10−3 Pa. In addition, the minimum full width at half maximum of the most intense photoluminescence peak derived from neutral donor bound excitons at 10 K decreased to 0.6 meV by the addition of N2O gas at a pressure of 3.1 × 10−2 Pa. |
| Databáze: | OpenAIRE |
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