Fabrication of an integrated spiral-type inductor dedicated to DC-DC microconverters

Autor: Monique Dilhan, D. Ligot, T. El Mastouli, David Bourrier, J.-L. Sanchez, Y. Lembeye, B. Cogitore, G. Troussier, H. Morel, Jean-Pierre Laur, V. Conedera
Rok vydání: 2005
Předmět:
Zdroj: 2005 European Conference on Power Electronics and Applications.
DOI: 10.1109/epe.2005.219660
Popis: This paper describes the fabrication steps of a spiral-type inductor designed for power electronics conversion. Realized on silicon wafer and using photolithography and electroplating techniques, this microinductor is composed of a copper spiral conductor sandwiched between two iron-nickel laminated magnetic layers. Furthermore, specific devices have been realized in order to characterize the magnetic material
Databáze: OpenAIRE