Disturbless flash memory due to high boost efficiency on BiCS structure and optimal memory film stack for ultra high density storage device

Autor: Ryota Katsumata, Yosuke Komori, Y. Nagata, Megumi Ishiduki, Masaru Kito, Hideaki Aochi, Hiroyasu Tanaka, Akihiro Nitayama, Yoshiaki Fukuzumi, M. Kido
Rok vydání: 2008
Předmět:
Zdroj: 2008 IEEE International Electron Devices Meeting.
DOI: 10.1109/iedm.2008.4796831
Popis: Program and erase operation on NAND-string of Bit-Cost Scalable (BiCS) flash memory has been successfully achieved. High boost efficiency of floating pillars and ONON (block oxide/charge SiN/tunnel oxide/tunnel SiN) structure as a memory film stack improve disturbance characteristics enough to realize tera-bit density of three dimensional flash memory. BiCS flash memory has become a more promising candidate for ultra high density memory.
Databáze: OpenAIRE