Observation of voltage contrast in non contact resonant mode Atomic Force Microscopy
| Autor: | S. Belaidi, P. Girard, G. Cohen Solal |
|---|---|
| Rok vydání: | 1996 |
| Předmět: |
Kelvin probe force microscope
business.industry Chemistry Electrostatic force microscope Atomic force acoustic microscopy Insulator (electricity) Conductive atomic force microscopy Condensed Matter Physics Electrostatics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optics Optoelectronics Electrical and Electronic Engineering business Non-contact atomic force microscopy Photoconductive atomic force microscopy |
| Zdroj: | Microelectronic Engineering. 31:215-225 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/0167-9317(95)00344-4 |
| Popis: | In this paper we present a new possibility for local voltage detection based on atomic force microscopy (AFM). We use the non contact resonant mode which is sensitive to local force gradients and then those related to electrostatics. The principle is given, experiments illustrate this effect both on metal and on an Integrated Circuit pad buried under insulator. The sensitivity of the method is discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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