Nanocolumnar Composite Microstructure of Superhard SiC Thin Film Deposited Using Unbalanced Magnetron Sputtering Method

Autor:	Y.-J. Baik, K.-E. Bae, Jong Keuk Park, Wook Seong Lee, K.-W. Chae
Rok vydání:	2016
Předmět:	010302 applied physics Materials science 0103 physical sciences General Materials Science 02 engineering and technology Sputter deposition Thin film Composite material 021001 nanoscience & nanotechnology 0210 nano-technology Condensed Matter Physics 01 natural sciences Composite microstructure
Zdroj:	Advanced Engineering Materials. 18:1123-1126
ISSN:	1438-1656
DOI:	10.1002/adem.201600008
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::47b6ae6ce8eeb8ae4d5e1980273f952b https://doi.org/10.1002/adem.201600008 Zobrazit plný text záznamu Plný text