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This article introduced a fast and stable method on measuring the batches of trace moisture in ultra-purity ammonia gas .This method is based on ammonia decomposited reaction ,which occurs completely and irreversibly when ammonia is passed over nickel catalyst at high temperatures. While the trace water wapor passes though the catalyst unchanged. And the moisture of ammonia may be determined by measuring the dew point of the steam of hydrogen and nitrogen produced by decomposition of ammonia,combined with the trace oxygen content measured by GC,the content of trace moisture in ultra-purity ammonia gas can be got. Contrasted with Cavity Ring-down Spectroscopy (CRDS) and Infrared Absorption Spectroscopy (IR),Thermal Decomposition Dew Point method (TDDP) has high accuracy,good repeatability, stability and environmentally friendly. |