| Autor: |
L. Frank, I. Müllerová |
| Rok vydání: |
2009 |
| Předmět: |
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| Zdroj: |
EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany ISBN: 9783540851547 |
| DOI: |
10.1007/978-3-540-85156-1_293 |
| Popis: |
For acquisition of secondary (SE) as well as backscattered electrons (BSE) in the scanning electron microscope (SEM), single-channel detection systems are traditionally used. We have designed a multi-channel detector collecting BSE emitted to eight intervals of polar angles, and tested it also in the cathode lens mode (CLM) [1]. First experiments showed the method suitable for observation of polycrystalline targets [2]. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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