Precipitate Morphologies in Oxygen - Ion Implanted Silicon: A High Resolution Electron Microscopy Study

Autor:	S.R. Wilson, G. Vanderschaeve, J.C. Barry, R.W. Carpenter, C.J. Varker
Rok vydání:	1986
Předmět:	Materials science Silicon Cryo-electron microscopy Mechanical Engineering Resolution (electron density) Analytical chemistry chemistry.chemical_element Condensed Matter Physics law.invention chemistry Mechanics of Materials law Oxygen ions General Materials Science Electron microscope
Zdroj:	Materials Science Forum. :1153-1158
ISSN:	1662-9752
DOI:	10.4028/www.scientific.net/msf.10-12.1153
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::479a4bef5274fa5c54dae8888fe64ad4 https://doi.org/10.4028/www.scientific.net/msf.10-12.1153 Zobrazit plný text záznamu