| Autor: |
John L. Champion, Dennis K. Wickenden, Thomas J. Kistenmacher, Douglas A. Oursler, Robert Osiander, Robert B. Givens |
| Rok vydání: |
1998 |
| Předmět: |
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| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.323908 |
| Popis: |
A novel magnetometer which utilizes the Lorentz force to measure vector magnetic fields has recently been described. The device, based on a classical resonating xylophone bar, has an extremely wide dynamic range and is ideally suited to miniaturization using a variety of technologies. The overall dimensions of the xylophone bar are limited by the width of the nodal supports which act as current electrodes and ultimately govern the resonance qualities. Minimum xylophone lengths of 10 and 5 mm mare attainable by electrostatic discharge machining and chemical milling of metal foils, respectively. Significantly smaller devices are achievable using polycrystalline silicon-based MEMS processing. However, the sheet resistivity of the silicon restricts the drive current through the xylophone bar and thus limits the sensitivity. This sensitivity can potentially by regained by replacing the silicon xylophone bar with a metal/piezoelectric/metal sandwich structure.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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