Effective Suppression of Amorphous Ga2O and Related Deep Levels on the GaN Surface by High-Temperature Remote Plasma Pretreatments in GaN-Based Metal–Insulator–Semiconductor Electronic Devices
| Autor: | Kexin Deng, Xinhua Wang, Sen Huang, Pengfei Li, Qimeng Jiang, Haibo Yin, Jie Fan, Ke Wei, Yingkui Zheng, Jingyuan Shi, Xinyu Liu |
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| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | ACS Applied Materials & Interfaces. 15:25058-25065 |
| ISSN: | 1944-8252 1944-8244 |
| Databáze: | OpenAIRE |
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