Modification of organic underlayers by plasma during dry etching and its effect on the film properties
| Autor: | Soojung C. Leem, Jae Hwan Sim, Youngeun Bae |
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| Rok vydání: | 2023 |
| Zdroj: | Advances in Patterning Materials and Processes XL. |
| Databáze: | OpenAIRE |
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