Chemical composition and selected mechanical properties of Al–Zn alloy modified in plasma conditions by RF CVD
| Autor: | S. Kluska, W. Jastrzębski, Marcin Środa, M. Januś, Łukasz Kaczmarek, Karol Kyzioł |
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| Rok vydání: | 2014 |
| Předmět: |
Plasma etching
Materials science Metallurgy Alloy Analytical chemistry General Physics and Astronomy chemistry.chemical_element Young's modulus Surfaces and Interfaces General Chemistry Chemical vapor deposition engineering.material Condensed Matter Physics Surfaces Coatings and Films symbols.namesake Ion implantation Coating chemistry engineering symbols Chemical composition Carbon |
| Zdroj: | Applied Surface Science. 311:33-39 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/j.apsusc.2014.04.193 |
| Popis: | The paper reports results of the study of surface composition and selected functional properties of 7075 (Al–Zn) alloys modified in Ar, N 2 , SiH 4 and CH 4 atmosphere at reduced pressure. RF CVD (Radio Frequency Chemical Vapour Deposition) technique was used in the study. The type or weight percentage of carbon in each modification varied in the resultant SiN:H and SiCN:H coatings. Alloy samples were treated with Ar + plasma etching and N + ion implantation at reduced pressure. The tests proved the values of selected mechanical properties (hardness ca. 10.5 GPa, Young modulus ca. 95 GPa) and adhesion (delamination force ca. 11.5 mN) to be higher in the case of SiCN:H anti-wear coating (deposited in SiH 4 :CH 4 :N 2 = 1:1:2 gas mixture) than the values of the respective parameters obtained in the remaining modifications. Further, carbon doped coatings (SiCN:H) exhibited significantly improved hardness (by about 50 to 70%) and nearly threefold increase in delamination force in comparison with SiCN:H coatings. |
| Databáze: | OpenAIRE |
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