Helium ion microscope: A new tool for nanoscale microscopy and metrology

Autor:	Billy W. Ward, John A. Notte, Nicholas P. Economou
Rok vydání:	2006
Předmět:	Diffraction Materials science Scanning electron microscope business.industry chemistry.chemical_element Condensed Matter Physics Focused ion beam Ion Metrology Optics chemistry Microscopy Electrical and Electronic Engineering business Field ion microscope Helium
Zdroj:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 24:2871
ISSN:	1071-1023
DOI:	10.1116/1.2357967
Popis:	ALIS Corporation has developed a new helium ion microscope which has many advantages over both traditional scanning electron microscopes (SEMs) and focused ion beams (FIBs). This new technology is expected to produce an ultimate focused spot size of 0.25nm. This high resolution is attributed to the high source brightness (B>4×109A∕cm2sr), low energy spread (ΔE∕E∼2×10−5), and small diffraction effects (λ∼80fm). The interaction of helium ions with matter offers several valuable contrast mechanisms and a surface interaction volume which is much smaller than a SEM or conventional FIB.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::46f680123dfeff9d403631fd23f81b5a https://doi.org/10.1116/1.2357967 Zobrazit plný text záznamu