Material properties of InAlAs layers grown by MBE on vicinal (111)B InP substrates

Autor: E Macarona, N Chrysanthakopoulos, Maria Kayambaki, A. Cornet, Francesca Peiró, Katerina Tsagaraki, Zacharias Hatzopoulos, K Michelakis, M. Calamiotou, N Bécourt, Anna Vilà, Alexandros Georgakilas
Rok vydání: 1999
Předmět:
Zdroj: Journal of Crystal Growth. :248-251
ISSN: 0022-0248
DOI: 10.1016/s0022-0248(98)01331-1
Popis: InAlAs layers and InGaAs/InAlAs quantum well heterostructures, grown by molecular beam epitaxy on vicinal (1 1 1)B InP substrates, exhibited extensive surface step bunching, compositional inhomogeneities and degraded crystalline quality, with variations depending on the exact misfit strain and growth conditions. Silicon and beryllium doping of (1 1 1) InAlAs behaved similarly to the (1 0 0) case but a different predominant deep level was detected in n-type (1 1 1) material.
Databáze: OpenAIRE