Modern Experimental Methods for Surface and Thin-Film Chemical Analysis

Autor:	C. A. Evans, R. J. Blattner
Rok vydání:	1978
Předmět:	Secondary ion mass spectrometry Auger electron spectroscopy Static secondary-ion mass spectrometry Materials science Sputtering Analytical chemistry General Materials Science Instrumental chemistry Thin film Composite material Electron spectroscopy Ion source
Zdroj:	Annual Review of Materials Science. 8:181-214
ISSN:	0084-6600
DOI:	10.1146/annurev.ms.08.080178.001145
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::46e1a7e8eeed7415528dbf205c55d4a9 https://doi.org/10.1146/annurev.ms.08.080178.001145 Zobrazit plný text záznamu