Measurement sensitivity of DUV scatterfield microscopy parameterized with partial coherence for duty ratio-varied periodic nanofeatures

Autor:	Eikhyun Cho, Taekyung Kim, Yoon Sung Bae, Sang-Soo Choi, Bryan M. Barnes, Richard M. Silver, Martin Y. Sohn
Rok vydání:	2022
Předmět:	Mechanical Engineering Electrical and Electronic Engineering Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Optics and Lasers in Engineering. 152:106953
ISSN:	0143-8166
DOI:	10.1016/j.optlaseng.2022.106953
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::46d658e6d687f65f52514ec47218fd31 https://doi.org/10.1016/j.optlaseng.2022.106953 Zobrazit plný text záznamu Full Text from ScienceDirect