Energy effective dual-pulse bispectral laser for EUV lithography
| Autor: | Igor S. Sidorov, V. V. Elizarov, R. P. Seisyan, Victor G. Bespalov, Aleksandr Zhevlakov, S. V. Kascheev, A. S. Grishkanich |
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| Rok vydání: | 2016 |
| Předmět: |
Materials science
Preamplifier business.industry Extreme ultraviolet lithography 02 engineering and technology 021001 nanoscience & nanotechnology Laser 01 natural sciences law.invention 010309 optics Wavelength Optics Resist law Extreme ultraviolet 0103 physical sciences Optoelectronics 0210 nano-technology business Lithography Next-generation lithography |
| Zdroj: | Extreme Ultraviolet (EUV) Lithography VII. |
| ISSN: | 0277-786X |
| DOI: | 10.1117/12.2219931 |
| Popis: | The power consumption in the two-pulse bispectral primary source could be substantially decreased by replacing the SRS converters from 1.06 μm into 10.6 μm wavelength as the preamplifier cascades in СО2 laser channel at the same efficiency radiation of EUV source. The creation of high volume manufacturing lithography facilities with the technological standard of 10-20 nm is related to the implementation of resist exposure modes with pulse repetition rate of 100 kHz. Low power consumption of the proposed scheme makes it promising for the creation of LPP EUV sources. |
| Databáze: | OpenAIRE |
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