Grain size dependence of 1/fnoise in Al‐Cu thin‐film interconnections
Autor: | B. I. Khizhnyak, A. J. Patrinos, E. A. Salkov, I. S. Bakshee, J. A. Schwarz |
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Rok vydání: | 1991 |
Předmět: | |
Zdroj: | Journal of Applied Physics. 70:1561-1564 |
ISSN: | 1089-7550 0021-8979 |
DOI: | 10.1063/1.349545 |
Popis: | 1/f noise measurements have been performed on Al‐Cu thin films, of varying grain size, which were also subjected to electromigration lifetime tests. The results indicate a strong grain size dependence of the 1/f noise magnitude in the films. Moreover there is a correlation between electromigration lifetimes and values of 1/f noise magnitude, suggesting that 1/f noise measurements could be used as a nondestructive alternative to traditional electromigration testing. |
Databáze: | OpenAIRE |
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