Grain size dependence of 1/fnoise in Al‐Cu thin‐film interconnections

Autor: B. I. Khizhnyak, A. J. Patrinos, E. A. Salkov, I. S. Bakshee, J. A. Schwarz
Rok vydání: 1991
Předmět:
Zdroj: Journal of Applied Physics. 70:1561-1564
ISSN: 1089-7550
0021-8979
DOI: 10.1063/1.349545
Popis: 1/f noise measurements have been performed on Al‐Cu thin films, of varying grain size, which were also subjected to electromigration lifetime tests. The results indicate a strong grain size dependence of the 1/f noise magnitude in the films. Moreover there is a correlation between electromigration lifetimes and values of 1/f noise magnitude, suggesting that 1/f noise measurements could be used as a nondestructive alternative to traditional electromigration testing.
Databáze: OpenAIRE