Electrical Properties and Reliability of Vapor Jet Deposited Oxide on SiC

Autor:	X.W. Wang, Takashi Tamagawa, G.J. Cui, Yasutaka Takahashi, Tso-Ping Ma, B. L. Halpern, J. J. Schmitt
Rok vydání:	1998
Předmět:	Jet (fluid) chemistry.chemical_compound Reliability (semiconductor) Materials science chemistry Mechanics of Materials Mechanical Engineering Oxide Electronic engineering General Materials Science Composite material Condensed Matter Physics
Zdroj:	Materials Science Forum. :865-868
ISSN:	1662-9752
DOI:	10.4028/www.scientific.net/msf.264-268.865
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::46750aec988de94ce737b6f9ff260330 https://doi.org/10.4028/www.scientific.net/msf.264-268.865 Zobrazit plný text záznamu