Highly charged ion based time-of-flight emission microscope

Autor:	Alex V. Hamza, Alan V. Barnes, Ed Magee, Mike Newman, Thomas Schenkel, Joseph W. McDonald, Dieter H. Schneider
Rok vydání:	2000
Předmět:	Secondary ion mass spectrometry Static secondary-ion mass spectrometry Materials science Physics::Plasma Physics Polyatomic ion Highly charged ion Microchannel plate detector Atomic physics Ion gun Instrumentation Ion Electron beam ion trap
Zdroj:	Review of Scientific Instruments. 71:2077-2081
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1150582
Popis:	A highly charged ion based time-of-flight emission microscope has been designed, which improves the surface sensitivity of static SIMS measurements because of the higher ionization probability of highly charged ions. Slow, highly charged ions are produced in an electron beam ion trap and are directed to the sample surface. The sputtered secondary ions and electrons pass through a specially designed objective lens to a microchannel plate detector. This new instrument permits high surface sensitivity (10 10 atoms/cm 2 ), high spatial resolution (100 nm), and chemical structural information due to the high molecular ion yields. The high secondary ion yield permits coincidence counting, which can be used to enhance determination of chemical and topological structure and to correlate specific molecular species.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::465a757b69119a9cd9e771e43954513a https://doi.org/10.1063/1.1150582 Zobrazit plný text záznamu