Failure modes in surface micromachined microelectromechanical actuation systems

Autor:	Kenneth A. Peterson, Samuel L. Miller, G La Vigne, P. Clews, Danelle M. Tanner, M. S. Rodgers, Jeffry J. Sniegowski
Rok vydání:	1999
Předmět:	Microelectromechanical systems Computer science Stiction Electronic engineering Electrical and Electronic Engineering Safety Risk Reliability and Quality Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Microelectronics Reliability. 39:1229-1237
ISSN:	0026-2714
DOI:	10.1016/s0026-2714(99)00013-x
Popis:	In order for the rapidly emerging field of MicroElectroMechanical Systems (MEMS) to meet its extraordinary expectations regarding commercial impact, issues pertaining to how they fail must be understood. We identify and address failure modes common to a broad range of MEMS actuation systems, including adhesion (stiction) and friction-induced failures caused by improper operational methods, mechanical instabilities, and electrical instabilities. Demonstrated methods to mitigate these failure modes include implementing optimized designs, model-based operational methods, and chemical surface treatments.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::46481ff2500c9059de492aca42337eb7 https://doi.org/10.1016/s0026-2714(99)00013-x Zobrazit plný text záznamu Full Text from ScienceDirect