Process and Properties of One-mask Patterned Ferroelectric Integrated Capacitor

Autor:	Kazuyoshi Torii, Hiroshi Kawakami, Takao Kumihashi, Toshihiko Itoga, Tooru Kaga, Natuki Yokoyama, Yoshihisa Fujisaki, Masahiro Moniwa, Kenichi Shoji
Rok vydání:	1997
Předmět:	Capacitor Materials science business.industry law Electronic engineering Process (computing) Optoelectronics Electrical and Electronic Engineering business Ferroelectricity Ferroelectric capacitor law.invention
Zdroj:	IEEJ Transactions on Electronics, Information and Systems. 117:248-255
ISSN:	1348-8155 0385-4221
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::460e06cd79d3308d7178dda526a0a615 https://doi.org/10.1541/ieejeiss1987.117.3_248 Zobrazit plný text záznamu