Current capacity evaluation of a cantilever probe

Autor:	Lester Jacob Thomas, Selvam Palasundram, Hon Kiet Kow
Rok vydání:	2008
Předmět:	Cantilever Materials science business.product_category business.industry Contact resistance Nanotechnology Electric charge Semiconductor Wafer testing Optoelectronics Die (manufacturing) Electric current Current (fluid) business
Zdroj:	2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT).
DOI:	10.1109/iemt.2008.5507796
Popis:	The tungsten-rhenium (WRe) 3mil cantilever probe is widely used in wafer probe at ON Semiconductors. The maximum current that can be supplied to a DUT is restricted by the current capacity of the probe needles. A typical 3 mil tip probe can carry 2 - 3 Amps at a short burst current (I short) for a
Databáze:	OpenAIRE
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