Reliability Characterization for 12 V Application Using the 22FFL FinFET Technology
| Autor: | C.-Y. Su, M. Maksud, James Waldemer, David Young, J. Palmer, S. Ramey, Mark Armstrong, H. Li, C. Perini, L. Paulson, M. El-tanani, H. Greve, Benjamin J. Orr, Sunny Chugh, Y. Yang |
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| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Computer science Transistor Process (computing) High voltage 02 engineering and technology 021001 nanoscience & nanotechnology Chip 01 natural sciences law.invention Reliability engineering Characterization (materials science) Reliability (semiconductor) law 0103 physical sciences 0210 nano-technology Voltage |
| Zdroj: | IRPS |
| Popis: | The 22FFL technology developed for operation to 3.3V is used to investigate process and design considerations required to extend technology capability to 12 V applications. A prototype chip was carefully designed in close consideration with the technology reliability requirements of the lower voltage components to demonstrate product-level reliability capabilities. The reliability of components such as transistors, well junctions, back-end dielectrics and MIMCAPs is thoroughly characterized and proven robust throughout a 10-year lifetime. The results demonstrate a reliable technology capability that is compliant with industrial standards to enable high-voltage design requirements. |
| Databáze: | OpenAIRE |
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