Large-grained Ag thin films with low electrical resistivity produced by sputtering in Kr gas

Autor:	Takayuki Kiba, Ryosuke Sagara, Midori Kawamura, Kyung Ho Kim, Yoshio Abe
Rok vydání:	2020
Předmět:	Materials science Physics and Astronomy (miscellaneous) Electrical resistivity and conductivity Sputtering General Engineering General Physics and Astronomy Thin film Composite material
Zdroj:	Japanese Journal of Applied Physics. 59:048001
ISSN:	1347-4065 0021-4922
DOI:	10.35848/1347-4065/ab8027
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4569a4ffc0fe57faddf36b1799a48072 https://doi.org/10.35848/1347-4065/ab8027 Zobrazit plný text záznamu