Machining of sub-micron holes using a femtosecond laser at 800 nm
| Autor: | P.P. Pronko, Gerard Mourou, Jeff Squier, Subrata Dutta, J. V. Rudd, D. Du |
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| Rok vydání: | 1995 |
| Předmět: |
Laser ablation
Materials science business.industry Laser beam machining Thermal diffusivity Laser Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention Optics Machining law Femtosecond Sapphire Electrical and Electronic Engineering Physical and Theoretical Chemistry Thin film business |
| Zdroj: | Optics Communications. 114:106-110 |
| ISSN: | 0030-4018 |
| DOI: | 10.1016/0030-4018(94)00585-i |
| Popis: | The ability to machine very small features in materials has a number of technological applications. We have ablated holes, by laser ablation, into a metal film. Using 200 fs, 800 nm pulses from a Ti:sapphire laser, focused to a spot size of 3000 nm, we have produced holes with a diameter of 300 nm and a depth of 52 nm. The production of these small features is possible because the effects of thermal diffusion are minimized with the short pulses. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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