Electromagnetic linear actuators with inductive position sensing
| Autor: | Thomas R. Ohnstein, Henry Guckel, J.D. Zook, T. Earles, J. Klein |
|---|---|
| Rok vydání: | 1996 |
| Předmět: |
Engineering
Electromagnet business.industry Acoustics Metals and Alloys Electrical engineering Linear actuator Dissipation Condensed Matter Physics Signal Displacement (vector) Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Inductance law Electrical and Electronic Engineering business Actuator Instrumentation Position sensor |
| Zdroj: | Sensors and Actuators A: Physical. 53:386-391 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/0924-4247(96)01137-5 |
| Popis: | Magnetically driven linear micro-actuators with 1 mN output force and hundreds of microns of total travel have been realized using LIGA-like processing techniques. These devices are driven at resonance frequencies of around 350 Hz and exhibit quality factors of about 300 in air. Exploiting wire-wound electromagnets, 300 μm resonant displacements have been demonstrated with drive signal currents of about 1 mA and power dissipation of less than 200 μW. In addition, the self inductance of the coils in these actuators varies linearly with plunger displacement. The inductance changes of about 1 μH μm−1 may be used for inductive position sensing and as a measure of output force. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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