Study on Start Burning Performance of Micro-ICP Using Stereo Spiral Coil
Autor: | Rong Xia Sun, Wen Jun Chen, Na Chong, Ying Chang Zhou, Yong Qing Wang |
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Rok vydání: | 2011 |
Předmět: |
Quantitative Biology::Biomolecules
Argon Materials science Spectrometer business.industry RF power amplifier General Engineering Analytical chemistry chemistry.chemical_element Plasma Spectral line Optics chemistry Physics::Plasma Physics Electromagnetic coil Physics::Space Physics Emission spectrum business Excitation |
Zdroj: | Advanced Materials Research. :390-394 |
ISSN: | 1662-8985 |
DOI: | 10.4028/www.scientific.net/amr.383-390.390 |
Popis: | According to the problem of low energy utilization of plane spiral coil used in micro-ICP, a kind of micro stereo helical coil was designed. Made 24 different structural parameters of stereo spiral coil whose diameter range 3~10 mm. Using comprehensive experimental method tested different parameters’ coils inspire argon plasma. In 13.56MHz RF power, relationships between argon pressure, coil turns, coil diameter and combustion /maintaining power of micro-ICP excitation source were tested. From spectrometer observed 17 argon emission spectrum in 690~860 nm. Spectral lines intensity influenced by RF power and work pressure. Experiments proved that micro-ICP excitation source using stereo helical coil is feasible. It can form Ar plasma and inspire Ar spectral lines. |
Databáze: | OpenAIRE |
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