Conditions for Micropipe Dissociation by 4H-SiC CVD Growth

Autor:	Kunikaza Izumi, Toshiyuki Miyanagi, Hidekazu Tsuchida, Isaho Kamata, Tamotsu Jikimoto
Rok vydání:	2003
Předmět:	Materials science Mechanics of Materials Mechanical Engineering General Materials Science Condensed Matter Physics Photochemistry Dissociation (chemistry) Micropipe
Zdroj:	Materials Science Forum. :261-264
ISSN:	1662-9752
DOI:	10.4028/www.scientific.net/msf.433-436.261
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::453c22b40de395fe031296dfd991b176 https://doi.org/10.4028/www.scientific.net/msf.433-436.261 Zobrazit plný text záznamu