Bubbler for constant vapor delivery of a solid chemical

Autor:	Taeho Ko, N. El-Zein, Deavenport Dennis Leon, Nam Hung Tran
Rok vydání:	2007
Předmět:	Inorganic Chemistry Cross section (physics) Average diameter Chemistry High pressure Mass transfer Heat transfer Materials Chemistry Analytical chemistry Metalorganic vapour phase epitaxy Condensed Matter Physics
Zdroj:	Journal of Crystal Growth. 298:168-171
ISSN:	0022-0248
DOI:	10.1016/j.jcrysgro.2006.10.018
Popis:	A bubbler chamber assembly comprising one chamber or two or more chambers connected in series, all chambers being in substantially vertical orientation. A solid or liquid source of the compound is contained in the chamber or chambers. The ratio between the length of the chamber or combined length of chambers connected in series with respect to the direction of flow of the carrier gas through the chamber or chambers and the average diameter equivalent of the cross section of the chamber or chambers with respect to the direction of flow of the carrier gas through the chamber or chambers is not less than about 6:1.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::45255e4ea213e8e2c6713335dfdd226d https://doi.org/10.1016/j.jcrysgro.2006.10.018 Zobrazit plný text záznamu Full Text from ScienceDirect