Fabrication of Bi-doped YIG optical thin film for electric current sensor by pulsed laser deposition
Autor: | Hirohito Takeshita, Souhachi Iwasa, Kiyotaka Ueda, Michitaka Nakahara, Hiromitsu Hayashi, Sadao Higuchi, Tsuyoshi Yoshitake, Nilesh J. Vasa, Shigeru Yokoyama |
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Rok vydání: | 2002 |
Předmět: |
Materials science
Excimer laser business.industry medicine.medical_treatment Doping Yttrium iron garnet General Physics and Astronomy Surfaces and Interfaces General Chemistry Substrate (electronics) Condensed Matter Physics Epitaxy Surfaces Coatings and Films Pulsed laser deposition chemistry.chemical_compound Optics chemistry medicine Optoelectronics Current sensor Thin film business |
Zdroj: | Applied Surface Science. :463-466 |
ISSN: | 0169-4332 |
Popis: | Bi-doped yttrium iron garnet (Bi x Y 3− x Fe 5 O 12 , Bi:YIG) thin films, which can be used as electric current sensors, are grown on Gd 3 Ga 5 O 12 (GGG) substrates by pulsed laser deposition (PLD) using an ArF excimer laser. The growth condition for high quality epitaxial Bi:YIG thin films is investigated by varying the PLD process parameters, such as the substrate temperature and ambient oxygen gas pressure. The epitaxial film growth is attained at the substrate temperature of around 500 °C and at ambient oxygen pressure between 125 and 175 mTorr. The optical properties of epitaxial films are measured and the maximum magneto-optic sensitivity coefficient is observed to be 44.1°/T with a film thickness of about 0.7 μm at a wavelength of 500 nm. The results indicate that the PLD technique can be useful for realizing a miniature current sensing device with the Bi:YIG thin film. |
Databáze: | OpenAIRE |
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