Complex determination of semiconductor layer parameters by fourier spectrometry methods

Autor:	V. V. Lezhnev, A. A. Kopylov
Rok vydání:	1987
Předmět:	symbols.namesake Fourier transform Semiconductor Materials science business.industry Applied Mathematics Analytical chemistry symbols Mass spectrometry business Instrumentation Layer (electronics)
Zdroj:	Measurement Techniques. 30:1151-1153
ISSN:	1573-8906 0543-1972
DOI:	10.1007/bf00864637
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::44ca87ea05e17f2489c0ab3243bb8b6d https://doi.org/10.1007/bf00864637 Zobrazit plný text záznamu Full text from SpringerLink