Patterning of Carbon Nanotubes by Material Assisted Laser Ablation Process

Autor:	Kanti Jain, Junghun Chae
Rok vydání:	2010
Předmět:	Materials science Laser ablation Fabrication Silicon Excimer laser medicine.medical_treatment chemistry.chemical_element Photoablation Nanotechnology Carbon nanotube Computer Science Applications law.invention Nanolithography chemistry law medicine Wafer Electrical and Electronic Engineering
Zdroj:	IEEE Transactions on Nanotechnology. 9:381-385
ISSN:	1941-0085 1536-125X
Popis:	Carbon nanotubes were patterned by a nonphotolithographic, low energy, large area, and high-throughput laser patterning process [material-assisted laser ablation (MALA)]. In this process, a residue layer was observed after the patterning process, requiring an additional cleaning process for the fabrication of electronic devices. In this paper, we investigated the mechanism of the residue layer formation, and optimized the MALA process so that no residue layer is formed after the patterning of carbon nanotubes. We demonstrated patterning of carbon nanotubes on 100 mm diameter silicon wafers, and the patterns of carbon nanotubes were sufficiently clean and sharp to be applicable in high-volume fabrication of electronic devices.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::449fac034949f32266a89fac67cd3252 https://doi.org/10.1109/tnano.2009.2029696 Zobrazit plný text záznamu