Ion-molecule reactions and ion energies in aCF4discharge

Autor:	I. V. Dyakov, M. V. V. S. Rao, James K. Olthoff, R. L. Champion, B. L. Peko
Rok vydání:	1999
Předmět:	chemistry.chemical_classification Electron transfer chemistry.chemical_compound Materials science chemistry Townsend discharge Tetrafluoride Compounds of carbon Electron Atomic physics Charged particle Dissociation (chemistry) Ion
Zdroj:	Physical Review E. 60:7449-7456
ISSN:	1095-3787 1063-651X
DOI:	10.1103/physreve.60.7449
Popis:	Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF(4)) discharges for collision energies below a few hundred electron volts. The reactions investigated include collision-induced dissociation and dissociative electron transfer reactions for CF(+)(3) and F(+) colliding with CF(4), and collisional electron detachment for F(-) colliding with CF4. Also presented are measurements of energies and relative intensities of ions generated in dc Townsend CF4 discharges with E/N values ranging from 4 x 10(-18) V m(2) to 25 x 10(-18) V m(2) [4 to 25 kTd]. Ion energy and ion intensity data for the Townsend discharges are analyzed in light of the measured cross sections.
Databáze:	OpenAIRE
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