Measurement of Strain Distribution below the Cutting Surface Using Micro Grid Applied Electron Beam Lithography

Autor:	Noboru Morita, Yoshitaro Yoshida, Kazumasa Kono, Satoshi Kishimoto
Rok vydání:	1994
Předmět:	Surface (mathematics) Rake angle Oxygen-free copper Materials science Optics business.industry Mechanical Engineering Vertical direction Rake business Layer (electronics) Electron-beam lithography Surface integrity
Zdroj:	Journal of the Japan Society for Precision Engineering. 60:581-585
ISSN:	1882-675X 0912-0289
DOI:	10.2493/jjspe.60.581
Popis:	This paper describes the influence of tool angles, especially rake angles, on the surface integrity of mirror cutting material. In this study, strain distribution in damaged layer is measured by a newly developed method. This method is applied electron beam lithography to drawing Au micro grids on the surface of oxygen free copper. Orthogonal cutting of specimen using various rake angle tools are carried out using a micro cutting device. It was found that strain distribution had close connection with tool geometry, and that highly compressed strain to vertical direction from machined surface was shown on the condition of negative rake angle tool. This method is effective to visualize cutting mechanism and material deformation at microscopic structure.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::447f4cb238e787fb59e559645f2a2a19 https://doi.org/10.2493/jjspe.60.581 Zobrazit plný text záznamu