Impedance matching in RF excited fast axial flow CO2 laser: The role of the capacitance due to laser head

Autor: Lalita Rana, M.S. Bhagat, A.K. Biswas, Lalit M. Kukreja
Rok vydání: 2012
Předmět:
Zdroj: Optics & Laser Technology. 44:2217-2222
ISSN: 0030-3992
DOI: 10.1016/j.optlastec.2012.02.035
Popis: Impedance matching in an indigenously developed 2 kW RF-excited fast axial flow (RF-FAF) CO 2 laser was seen to be significantly influenced by the capacitance formed between the laser head and the electrodes. We find in the published literature that this capacitance is generally assumed to be negligible while designing the matching network in the RF-FAF CO 2 lasers. It is shown that this capacitance could have a significant value and consequently would modify the design of the matching network remarkably for a specific laser design studied in the present case. The widely used discharge load model for capacitively coupled RF (CCRF) discharge excited CO 2 laser plasma is extended to include this capacitance. The method of measurement of this capacitance using a bridge and the ANSYS software based simulation of its formation due to the laser head structure are discussed.
Databáze: OpenAIRE