Laser Technologies in Micro-Optics. Part 2. Fabrication of Elements with a Three-Dimensional Profile
| Autor: | M. M. Sergeev, Alexander G. Poleshchuk, Victor P. Korolkov, R. A. Zakoldaev, Vadim P. Veiko |
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| Rok vydání: | 2018 |
| Předmět: |
Fabrication
Materials science Field (physics) business.industry Microplasma 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics Laser 01 natural sciences law.invention 010309 optics Wavelength Optics law 0103 physical sciences Electrical and Electronic Engineering Photomask Photonics 0210 nano-technology business Instrumentation |
| Zdroj: | Optoelectronics, Instrumentation and Data Processing. 54:113-126 |
| ISSN: | 1934-7944 8756-6990 |
| DOI: | 10.3103/s8756699018020012 |
| Popis: | Recent research in the field of formation of a 3D profile of optical elements with the use of direct laser writing at various wavelengths and photolithographic technologies on the basis of photomasks fabricated by means of laser writing is reviewed. Typical characteristics of the relief, as well as advantages and drawbacks of the above-mentioned methods are considered. |
| Databáze: | OpenAIRE |
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