Effects of Substrate Temperature on Film Hardness and Hydrogen Content in Diamond-like Carbon Films Prepared with a Repetitive Nanosecond Pulsed Glow Hydrogen/Methane Discharge Plasma
| Autor: | Katsuya Ioka, Ryohei Masai, Takuma Mine, Yusuke Kikuchi, Mitsuyasu Yatsuzuka |
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| Rok vydání: | 2021 |
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| Zdroj: | Plasma and Fusion Research. 16:1206038-1206038 |
| ISSN: | 1880-6821 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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