Analysis of 0.13 μm CMOS Technology Using Time Resolved Light Emission

Autor: Simon Yeung, Jason Goertz, Olivier Rinaudo, Lousinda Long, Peter Ouimet
Rok vydání: 2004
Předmět:
Zdroj: International Symposium for Testing and Failure Analysis.
ISSN: 0890-1740
DOI: 10.31399/asm.cp.istfa2004p0203
Popis: This paper describes case histories of 0.13 um bulk CMOS technology analyses using Time Resolved Light Emission (TRLEM). Using this technique, scan chain, timing, and logic failures are shown to be quickly and decisively identified thereby meeting the need for rapid feedback on 1st silicon failures and process excursions.
Databáze: OpenAIRE