A simple dynamic piezoelectric X‐Y translation stage suitable for scanning probe microscopes

Autor:	J. Tapson, J. R. Greene
Rok vydání:	1993
Předmět:	Coupling Materials science Microscope business.industry Translation (geometry) Piezoelectricity Displacement (vector) law.invention Scanning probe microscopy Optics law Scanning tunneling microscope business Actuator Instrumentation
Zdroj:	Review of Scientific Instruments. 64:2387-2388
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1143942
Popis:	We describe a novel XY micropositioning stage which operates using a single piezoelectric actuator to produce slip‐stick motion. The stage can be moved in steps as small as 20 nm over an area of 9 mm×9 mm, at translation speeds of up to 0.5 mm/s. Cross coupling between axes is negligible, and the threshold voltage for movement is typically 10 V or less. The device is simple in construction and requires no precision components. The stage is small and robust, requires no mechanical connections, and offers the unique advantage in scanning tunneling microscopy and atomic force microscopy applications of being able to provide a Z displacement of some microns.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::443e446ab5481182ce16057663876752 https://doi.org/10.1063/1.1143942 Zobrazit plný text záznamu