Imaging layers for the directed assembly of block copolymer films: Dependence of the physical and chemical properties of patterned polymer brushes on brush molecular weight
| Autor: | Robert J. Hamers, Paul F. Nealey, Jeremy A. Streifer, Karl O. Stuen, Eungnak Han, Insik In, Padma Gopalan |
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| Rok vydání: | 2007 |
| Předmět: |
chemistry.chemical_classification
Materials science Polymer Condensed Matter Physics Polymer brush digestive system Poly(methyl methacrylate) Surface energy chemistry.chemical_compound Chemical engineering chemistry Ellipsometry visual_art Polymer chemistry Copolymer visual_art.visual_art_medium Polymer blend Polystyrene Electrical and Electronic Engineering |
| Zdroj: | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 25:1958 |
| ISSN: | 1071-1023 |
| DOI: | 10.1116/1.2799970 |
| Popis: | The directed assembly of polystyrene-block-poly(methyl methacrylate) films using chemically nanopatterned polymer brush surfaces with various molecular weights was investigated. The brushes (3–10nm in thickness) were made from polystyrene that was end grafted to silicon wafers and patterned to have 40–60nm period stripes consisting of unmodified polymer and polymer that was subjected to brief oxygen plasma. The best assembly of block copolymer films was achieved using brushes with molecular weights of 3kg∕mol or less. The brushes were analyzed by goniometry, infrared reflection-absorption spectroscopy, x-ray photoelectron spectroscopy, and ellipsometry. The brush thickness increased nonlinearly with molecular weight and the high molecular weight brushes reconstructed under solvent and thermal annealing. The lower molecular weight brushes form the best imaging layers due to their optimum thickness that provides uniform surface coverage and prevents reconstruction of the film surface. The thin brushes ensur... |
| Databáze: | OpenAIRE |
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