Interface positions measured at the lattice constant scale by Auger analysis on chemical bevels

Autor:	J. Cazaux, G. Laurencin, J. Olivier
Rok vydání:	1984
Předmět:	chemistry.chemical_classification Materials science Auger effect business.industry General Engineering Analytical chemistry Heterojunction Auger symbols.namesake Lattice constant Semiconductor chemistry Lattice (order) symbols business Inorganic compound Quantum well
Zdroj:	Journal de Physique Lettres. 45:999-1005
ISSN:	0302-072X
DOI:	10.1051/jphyslet:019840045020099900
Popis:	Experimental results of Auger profiles obtained on chemical bevels of hetero-epitaxial structures (InP/Ga x In 1−x As/InP) are reported. The theoretical analysis of these results shows that the positions of the interfaces and widths of the quantum wells can be determined with an accuracy of ± one lattice spacing (ultimate limit). The evolution of the concentration gradient is also suggested. Quantum wells of ∼3.5 nm thick (6 lattice spacings) are well resolved Presentation des profils Auger obtenus sur des biseaux chimiques d'heterostructures epitaxiees InP/Ga x In 1−x As/InP. L'analyse theorique des resultats montre que la position des interfaces et la largeur des puits quantiques peut etre determinee avec une precision de ± une maille cristalline. Evolution du gradient de concentration
Databáze:	OpenAIRE
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