Surface dielectric anisotropies and phase diagrams of (001) GaAs

Autor: David E. Aspnes, A. A. Studna, L. T. Florez, J. P. Harbison
Rok vydání: 1990
Předmět:
Zdroj: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 8:936
ISSN: 0734-211X
Popis: Using the double‐modulation extension of reflectance‐difference spectroscopy, we obtain surface dielectric anisotropy spectra under steady‐state conditions for several reconstructions encountered in molecular beam epitaxy on (001) GaAs and follow their evolution with temperature. The changes observed with temperature are gradual, generally not exhibiting distinct boundaries. Marked changes in anisotropy are observed during thermal desorption of the native oxide, indicating that the process is not simple but involves surface roughening.
Databáze: OpenAIRE