Measurement of real-time stress damage of monocrystal silicon by Mach-Zehnder interferometry

Autor:	谭 勇 Tan Yong, 蔡继兴 Cai Ji-xing, 吴春婷 Wu Chunting, 李 贺 Li He, 金光勇 Jin Guangyong
Rok vydání:	2017
Předmět:	Interferometry Materials science Optics Silicon chemistry business.industry chemistry.chemical_element Time stress Mach–Zehnder interferometer business Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Optics and Precision Engineering. 25:1395-1401
ISSN:	1004-924X
DOI:	10.3788/ope.20172505.1395
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::440fdb22bcad19814839f15ff6fbce9b https://doi.org/10.3788/ope.20172505.1395 Zobrazit plný text záznamu