Nanoscale 3D Shape Process Monitoring Using TSOM

Autor:	Ravi Kiran Attota
Rok vydání:	2018
Předmět:	Laser linewidth Materials science Optical microscope Scanning electron microscope law Scientific method Finite-difference time-domain method Nanotechnology TSOM Nanoscopic scale Microscale chemistry law.invention
Zdroj:	Imaging and Applied Optics 2018 (3D, AO, AIO, COSI, DH, IS, LACSEA, LS&C, MATH, pcAOP).
Popis:	Through-focus scanning optical microscopy (TSOM) is sensitive to three-dimensional shape changes of nanoscale to microscale targets. Here we demonstrate process monitoring method of 3D targets using TSOM down to sub-nanometer.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::43eb00ac738e6fbfba3636db45453dc7 https://doi.org/10.1364/aio.2018.aw3a.1 Zobrazit plný text záznamu