A wet release process for fabricating slender and compliant suspended micro-mechanical structures
| Autor: | Harrie Tilmans, Wim Laureyn, Kris Baert, Sayanu Pamidighantam, Robert Puers, Cristina Rusu |
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| Rok vydání: | 2003 |
| Předmět: |
Fabrication
Materials science Silicon Metals and Alloys chemistry.chemical_element Nanotechnology Germanium Substrate (electronics) engineering.material Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Contact angle Surface micromachining Polycrystalline silicon chemistry Aluminium engineering Electrical and Electronic Engineering Composite material Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 103:202-212 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/s0924-4247(02)00350-3 |
| Popis: | This paper reports on the development of a generic wet release process for the fabrication of suspended slender and compliant micromechanical structures of poly-SiGe, poly-Si and aluminium with thickness values in the range 0.5–2 mm and gap spacing from 0.5 to 2 mm, respectively. A self-assembled monolayer (SAM) of n-decyltrichlorosilane (DTS) is used as an anti-stiction material. Process characterisation studies include DTS SAM characterisation, release of polycrystalline silicon germanium test structures, polycrystalline silicon device structures on silicon substrate and Aluminium test structures on AF45 glass substrate. We have obtained work of adhesion values of 0.06, 11, and 1 mJ/m 2 , slenderness ratio (SR) values of 3464, 752.2, and 2061, compliance (C) of 2100, 12, and 120 m/N, and contact angle of 1298 ,1 268, and 110.38, for poly-SiGe, poly-Si and aluminium cantilevers respectively. Our results compare favourably well with results from the literature. # 2003 Elsevier Science B.V. All rights reserved. |
| Databáze: | OpenAIRE |
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