Dynamical Modeling of Laser ablation Processes

Autor:	J. M. Donato, Kuan-Ren Chen, J. N. Leboeuf, David B. Geohegan, R. F. Wood, C. L. Liu, Alexander A. Puretzky
Rok vydání:	1995
Předmět:	Materials science Laser ablation Thermodynamic equilibrium Analytical chemistry Plasma Laser Pulsed laser deposition Computational physics law.invention Plume law Deposition (phase transition) Physics::Atomic Physics Thin film
Zdroj:	MRS Proceedings. 388
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-388-3
Popis:	Several physics and computational approaches have been developed to globally characterize phenomena important for film growth by pulsed laser deposition of materials. these include thermal models of laser-solid target interactions that initiate the vapor plume; plume ionization and heating through laser absorption beyond local thermodynamic equilibrium mechanisms; gas dynamic, hydrodynamic, and collisional descriptions of plume transport; and molecular dynamics models of the interaction of plume particles with the deposition substrate. the complexity of the phenomena involved in the laser ablation process is matched by the diversity of the modeling task, which combines materials science, atomic physics, and plasma physics.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4393a1af4c7fdfbd65772f7a4e7583ad https://doi.org/10.1557/proc-388-3 Zobrazit plný text záznamu Full text from SpringerLink