Studying the Composition and Phase State of Thin PZT Films Obtained by High-Frequency Magnetron Sputtering under Variation of Working Gas Pressure
| Autor: | D. M. Dolgintsev, V. P. Pronin, I. P. Pronin, S. V. Senkevich, E. Yu. Kaptelov |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science Physics and Astronomy (miscellaneous) Phase state Annealing (metallurgy) 02 engineering and technology Sputter deposition 021001 nanoscience & nanotechnology Lead zirconate titanate 01 natural sciences chemistry.chemical_compound Gas pressure chemistry 0103 physical sciences Composite material 0210 nano-technology Stoichiometry |
| Zdroj: | Technical Physics Letters. 45:246-249 |
| ISSN: | 1090-6533 1063-7850 |
| DOI: | 10.1134/s1063785019030258 |
| Popis: | Variation of the working gas pressure (from 8 to 2 Pa) during RF magnetron sputtering deposition of thin perovskite lead zirconate titanate (PZT) films revealed strong changes in their lead content, which decreased below the stoichiometric level and led to the formation of a two-phase (perovskite–pyrochlore) structure upon subsequent high-temperature annealing. Measurements of the composition of perovskite islands in the two-phase films showed that the lead content in these islands was equal to or greater than stoichiometric. These results lead to the conclusion that the obtained PZT films are free of lead vacancies. |
| Databáze: | OpenAIRE |
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